Vibration Analysis of V-shaped Beam Electrothermal Microactuators

TY - GEN

T1 - Vibration Analysis of V-shaped Beam Electrothermal Microactuators

AU - Zhang, Zhuo

AU - Yu, Yueqing

AU - Zhang, Xuping

PY - 2017

Y1 - 2017

N2 - This paper presents an analytical model for the vibration analysis of V-shaped beam electrothermal microactuators. With the consideration of the unique geometrical feature, i.e., the V-shaped beam with the two inclined half-spans interconnecting at the center of the beam, both lateral and longitudinal flexible deformations are included the vibration model established in this work. Furthermore, the vibrations in the lateral and longitudinal directions are coupled, therefore both the boundary and continuity conditions are defined to obtain the frequency equation. The natural frequencies can be calculated by solving the frequency equation numerically. To verify the established vibration model, the comparison is conducted between analytical results and finite-element (FE) simulation results using commercial software ANSYS. The comparison of the modal shapes and frequencies demonstrate the results based on the established analytical model well agree with FE simulation results. This work provides the first insight study on the vibration analysis of the V-shaped beam electrothermal microactuators with aims to lay the foundation of establishing thermo-mechanical model that could be used for the control of V-shaped actuators, and the improvement design in achieving optimal dynamic performance.

AB - This paper presents an analytical model for the vibration analysis of V-shaped beam electrothermal microactuators. With the consideration of the unique geometrical feature, i.e., the V-shaped beam with the two inclined half-spans interconnecting at the center of the beam, both lateral and longitudinal flexible deformations are included the vibration model established in this work. Furthermore, the vibrations in the lateral and longitudinal directions are coupled, therefore both the boundary and continuity conditions are defined to obtain the frequency equation. The natural frequencies can be calculated by solving the frequency equation numerically. To verify the established vibration model, the comparison is conducted between analytical results and finite-element (FE) simulation results using commercial software ANSYS. The comparison of the modal shapes and frequencies demonstrate the results based on the established analytical model well agree with FE simulation results. This work provides the first insight study on the vibration analysis of the V-shaped beam electrothermal microactuators with aims to lay the foundation of establishing thermo-mechanical model that could be used for the control of V-shaped actuators, and the improvement design in achieving optimal dynamic performance.

KW - Dynamic model

KW - Electrothermal actuator

KW - Free vibration

KW - V-shaped beam

U2 - 10.1115/DETC2017-67486

DO - 10.1115/DETC2017-67486

M3 - Article in proceedings

VL - 4

BT - 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems

PB - American Society of Mechanical Engineers

T2 - 2017 ASME International Design Engineering Technical Conferences & Computers & Information in Engineering Conference

Y2 - 6 August 2017 through 9 August 2017

ER -