Turbostratic-like carbon nitride coatings deposited by industrial-scale direct current magnetron sputtering

Research output: Contribution to journal/Conference contribution in journal/Contribution to newspaperJournal articleResearchpeer-review

  • Sascha Louring, Denmark
  • Nis Dam Madsen, Denmark
  • Anders Nørløv Berthelsen, Denmark
  • B. H. Christensen, DTI, Denmark
  • K.P. Almtoft, DTI, Denmark
  • Lars Pleth Nielsen, Teknologisk Institut, Denmark
  • Jørgen Bøttiger, Denmark
Original languageEnglish
JournalThin Solid Films
Volume536
Pages (from-to)25-31
Number of pages7
ISSN0040-6090
DOIs
Publication statusPublished - 2013

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