Texture and microstructure of Cr2O3 and (Cr,Al)2O3 thin films deposited by reactive inductively coupled plasma magnetron sputtering

Research output: Contribution to journal/Conference contribution in journal/Contribution to newspaperJournal articleResearchpeer-review

  • K. Pedersen, Denmark
  • Jørgen Bøttiger, Denmark
  • Madana G. Sridharan, Denmark
  • Michael Brammer Sillassen, Denmark
  • Per Eklund
  • Interdisciplinary Nanoscience Center
  • Department of Physics and Astronomy
Original languageEnglish
JournalThin Solid Films
Volume518
Issue15
Pages (from-to)4294–4298
Number of pages5
ISSN0040-6090
DOIs
Publication statusPublished - 2010

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