Terahertz devices with reconfigurable metamaterials by surface micromachining technique

Zhengli Han; Kenta Kohno; Hiroyuki Fujita; Kazuhiko Hirakawa; Hiroshi Toshiyoshi

doi:10.1541/ieejsmas.135.450

Terahertz devices with reconfigurable metamaterials by surface micromachining technique

Zhengli Han, Kenta Kohno, Hiroyuki Fujita, Kazuhiko Hirakawa, Hiroshi Toshiyoshi^*

^*Corresponding author for this work

Research output: Contribution to journal/Conference contribution in journal/Contribution to newspaper › Journal article › Research › peer-review

6 Citations (Scopus)

Abstract

We propose an approach to build tunable terahertz (THz) devices by using the concept of reconfigurable metamaterials developed by surface MEMS (micro electro mechanical system) technique. The implemented metamaterial is composed of an array of unit cells based on the inductor-capacitor (LC) resonators. By using the MEMS technique to reconfigure the structure of the unit cell, thus the capacitance of the resonator, we demonstrated the tunable transmission of the metamaterial device controlled by applied voltage (around 40 V). The device can be used as a tunable THz band-stop filter and an amplitude modulator with double frequency bands. By engineering the arrayed configuration for the unit cells, we propose a method to constitute a programmable THz spatial modulator, such as a THz lens, which has wide range of applications in THz spectroscopy and THz communication.

Original language	English
Journal	IEEJ Transactions on Sensors and Micromachines
Volume	135
Issue	11
Pages (from-to)	450-453
Number of pages	4
ISSN	1341-8939
DOIs	https://doi.org/10.1541/ieejsmas.135.450
Publication status	Published - 1 Nov 2015
Externally published	Yes

Keywords

Electrostatic actuation
Reconfigurable metamaterial
Surface MEMS
Tunable THz devices

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10.1541/ieejsmas.135.450

Cite this

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title = "Terahertz devices with reconfigurable metamaterials by surface micromachining technique",

abstract = "We propose an approach to build tunable terahertz (THz) devices by using the concept of reconfigurable metamaterials developed by surface MEMS (micro electro mechanical system) technique. The implemented metamaterial is composed of an array of unit cells based on the inductor-capacitor (LC) resonators. By using the MEMS technique to reconfigure the structure of the unit cell, thus the capacitance of the resonator, we demonstrated the tunable transmission of the metamaterial device controlled by applied voltage (around 40 V). The device can be used as a tunable THz band-stop filter and an amplitude modulator with double frequency bands. By engineering the arrayed configuration for the unit cells, we propose a method to constitute a programmable THz spatial modulator, such as a THz lens, which has wide range of applications in THz spectroscopy and THz communication.",

keywords = "Electrostatic actuation, Reconfigurable metamaterial, Surface MEMS, Tunable THz devices",

author = "Zhengli Han and Kenta Kohno and Hiroyuki Fujita and Kazuhiko Hirakawa and Hiroshi Toshiyoshi",

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doi = "10.1541/ieejsmas.135.450",

language = "English",

volume = "135",

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Terahertz devices with reconfigurable metamaterials by surface micromachining technique. / Han, Zhengli; Kohno, Kenta; Fujita, Hiroyuki et al.
In: IEEJ Transactions on Sensors and Micromachines, Vol. 135, No. 11, 01.11.2015, p. 450-453.

Research output: Contribution to journal/Conference contribution in journal/Contribution to newspaper › Journal article › Research › peer-review

TY - JOUR

T1 - Terahertz devices with reconfigurable metamaterials by surface micromachining technique

AU - Han, Zhengli

AU - Kohno, Kenta

AU - Fujita, Hiroyuki

AU - Hirakawa, Kazuhiko

AU - Toshiyoshi, Hiroshi

PY - 2015/11/1

Y1 - 2015/11/1

N2 - We propose an approach to build tunable terahertz (THz) devices by using the concept of reconfigurable metamaterials developed by surface MEMS (micro electro mechanical system) technique. The implemented metamaterial is composed of an array of unit cells based on the inductor-capacitor (LC) resonators. By using the MEMS technique to reconfigure the structure of the unit cell, thus the capacitance of the resonator, we demonstrated the tunable transmission of the metamaterial device controlled by applied voltage (around 40 V). The device can be used as a tunable THz band-stop filter and an amplitude modulator with double frequency bands. By engineering the arrayed configuration for the unit cells, we propose a method to constitute a programmable THz spatial modulator, such as a THz lens, which has wide range of applications in THz spectroscopy and THz communication.

AB - We propose an approach to build tunable terahertz (THz) devices by using the concept of reconfigurable metamaterials developed by surface MEMS (micro electro mechanical system) technique. The implemented metamaterial is composed of an array of unit cells based on the inductor-capacitor (LC) resonators. By using the MEMS technique to reconfigure the structure of the unit cell, thus the capacitance of the resonator, we demonstrated the tunable transmission of the metamaterial device controlled by applied voltage (around 40 V). The device can be used as a tunable THz band-stop filter and an amplitude modulator with double frequency bands. By engineering the arrayed configuration for the unit cells, we propose a method to constitute a programmable THz spatial modulator, such as a THz lens, which has wide range of applications in THz spectroscopy and THz communication.

KW - Electrostatic actuation

KW - Reconfigurable metamaterial

KW - Surface MEMS

KW - Tunable THz devices

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JO - IEEJ Transactions on Sensors and Micromachines

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IS - 11

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Terahertz devices with reconfigurable metamaterials by surface micromachining technique

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Keywords

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