Tantalum films with well-controlled roughness grown by oblique incidence deposition

Research output: Contribution to journal/Conference contribution in journal/Contribution to newspaperJournal articleResearchpeer-review

  • Interdisciplinary Nanoscience Center
  • Department of Physics and Astronomy
Original languageEnglish
JournalApplied Physcis Letters
Volume87
Publication statusPublished - 2005

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ID: 295260