Synthesis of hydrogenated diamondlike carbon thin films using neon-acetylene based high power impulse magnetron sputtering discharges

Research output: Contribution to journal/Conference contribution in journal/Contribution to newspaperJournal articleResearchpeer-review

DOI

  • Asim Aijaz, Linkoping University, Uppsala University
  • ,
  • Sascha Louring, Danish Technol Inst, Tribol Ctr
  • ,
  • Daniel Lundin, Université Paris Sud
  • ,
  • Tomas Kubart, Uppsala University
  • ,
  • Jens Jensen, Linkoping University
  • ,
  • Kostas Sarakinos, Linkoping University
  • ,
  • Ulf Helmersson, Linkoping University
Original languageEnglish
Article number061504
JournalJournal of Vacuum Science & Technology. A: International Journal Devoted to Vacuum, Surfaces, and Films
Volume34
Issue6
Number of pages8
ISSN0734-2101
DOIs
Publication statusPublished - 2016

    Research areas

  • C-H FILMS, CHEMICAL-VAPOR-DEPOSITION, AMORPHOUS-CARBON, PLASMA, HIPIMS, GROWTH, VOLTAGE, TI

See relations at Aarhus University Citationformats

ID: 107622163