Suspended subwavelength gratings for optical processing and optomechanics

Ali A. Darki*, Alexios Parthenopoulos, Bjarke R. Jeppesen, Jens V. Nygaard, Aurélien Dantan

*Corresponding author for this work

Research output: Contribution to book/anthology/report/proceedingArticle in proceedingsResearchpeer-review


Owing to their high optical and mechanical quality suspended silicon nitride thin films are widely used for photonics and sensing applications. We discuss the fabrication and characterization of highly reflective one- dimensional subwavelength gratings patterned on commercial high-tensile stress Si3N4 membranes. Their non- invasive structural characterization using Atomic Force Microscopy provides detailed information on both the grating transverse profile and the deflection of the films after etching, which are compared with optical measurements and mechanical simulations, respectively. We then apply these ultrathin, low-loss optical components to optical spatial differentiation and demonstrate high quality first- and second-order spatial differentiation of the transverse profile of a Gaussian beam.

Original languageEnglish
Title of host publicationHigh Contrast Metastructures X
EditorsConnie J. Chang-Hasnain, Jonathan A. Fan, Weimin Zhou
PublisherSPIE - International Society for Optical Engineering
Publication date2021
Article number116951N
ISBN (Electronic)9781510642256
Publication statusPublished - 2021
EventHigh Contrast Metastructures X 2021 - Virtual, Online, United States
Duration: 6 Mar 202111 Mar 2021


ConferenceHigh Contrast Metastructures X 2021
Country/TerritoryUnited States
CityVirtual, Online
SponsorThe Society of Photo-Optical Instrumentation Engineers (SPIE)
SeriesProceedings of SPIE - The International Society for Optical Engineering


  • Atomic force microscopy
  • Membrane deflection
  • Optical spatial differentiation
  • Subwavelength grating


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