Pulsed DC magnetron sputtered Al2O3 films and their hardness

Madana G. Sridharan, Michael Brammer Sillassen, Jørgen Bøttiger, Jacques Chevallier, Henrik Birkedal

    Research output: Contribution to journal/Conference contribution in journal/Contribution to newspaperJournal articleResearchpeer-review

    Original languageEnglish
    JournalSurface & Coatings Technology
    Volume202
    Issue4-7
    Pages (from-to)920-924
    Publication statusPublished - 2007

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