TY - JOUR
T1 - Plasma-enhanced chemical vapor deposition of TiB2 and TiBN hard coatings using BBr3
AU - Movassagh-Alanagh, Farid
AU - Abdollah-zadeh, Amir
AU - Alizadeh Zolbin, Maryam
AU - Nemati, Narguess
AU - Aghababaei, Ramin
PY - 2023/1
Y1 - 2023/1
N2 - In this work, titanium nitride, titanium boro-nitride and titanium di boride coatings were deposited on H13 steel using plasma-enhanced chemical vapor deposition from BBr
3, TiCl
4, N
2, H
2 and Ar reactants at 500 °C. The results showed that the TiBN coating has a crystalline microstructure composed of both TiN and TiB
2 phases. The calculated crystalline size of the TiN, TiBN and TiB
2 coatings was about 13, 10 and 32 nm, respectively. The thickness of TiN, TiBN and TiB
2 coatings was about 2.5, 0.3 and 0.5 µm, respectively. The hardness of TiN, TiBN and TiB
2 films was 15.74, 19.44 and 23.47 GPa, respectively. The highest wear resistance was achieved for the TiB
2 coating thanks to its high hardness and good adhesion strength.
AB - In this work, titanium nitride, titanium boro-nitride and titanium di boride coatings were deposited on H13 steel using plasma-enhanced chemical vapor deposition from BBr
3, TiCl
4, N
2, H
2 and Ar reactants at 500 °C. The results showed that the TiBN coating has a crystalline microstructure composed of both TiN and TiB
2 phases. The calculated crystalline size of the TiN, TiBN and TiB
2 coatings was about 13, 10 and 32 nm, respectively. The thickness of TiN, TiBN and TiB
2 coatings was about 2.5, 0.3 and 0.5 µm, respectively. The hardness of TiN, TiBN and TiB
2 films was 15.74, 19.44 and 23.47 GPa, respectively. The highest wear resistance was achieved for the TiB
2 coating thanks to its high hardness and good adhesion strength.
KW - Hard coatings
KW - PECVD
KW - Wear-resistance
U2 - 10.1016/j.triboint.2022.108137
DO - 10.1016/j.triboint.2022.108137
M3 - Journal article
SN - 0301-679X
VL - 179
JO - Tribology International
JF - Tribology International
M1 - 108137
ER -