Plasma-enhanced chemical vapor deposition of TiB2 and TiBN hard coatings using BBr3

Farid  Movassagh-Alanagh; Amir Abdollah-zadeh; Maryam Alizadeh Zolbin; Narguess Nemati; Ramin Aghababaei

doi:10.1016/j.triboint.2022.108137

Plasma-enhanced chemical vapor deposition of TiB₂ and TiBN hard coatings using BBr₃

Farid Movassagh-Alanagh, Amir Abdollah-zadeh^*, Maryam Alizadeh Zolbin, Narguess Nemati, Ramin Aghababaei

^*Corresponding author for this work

Department of Mechanical and Production Engineering - Mechanics and Materials

Research output: Contribution to journal/Conference contribution in journal/Contribution to newspaper › Journal article › Research › peer-review

15 Citations (Scopus)

Abstract

In this work, titanium nitride, titanium boro-nitride and titanium di boride coatings were deposited on H13 steel using plasma-enhanced chemical vapor deposition from BBr ₃, TiCl ₄, N ₂, H ₂ and Ar reactants at 500 °C. The results showed that the TiBN coating has a crystalline microstructure composed of both TiN and TiB ₂ phases. The calculated crystalline size of the TiN, TiBN and TiB ₂ coatings was about 13, 10 and 32 nm, respectively. The thickness of TiN, TiBN and TiB ₂ coatings was about 2.5, 0.3 and 0.5 µm, respectively. The hardness of TiN, TiBN and TiB ₂ films was 15.74, 19.44 and 23.47 GPa, respectively. The highest wear resistance was achieved for the TiB ₂ coating thanks to its high hardness and good adhesion strength.

Original language	English
Article number	108137
Journal	Tribology International
Volume	179
Number of pages	16
ISSN	0301-679X
DOIs	https://doi.org/10.1016/j.triboint.2022.108137
Publication status	Published - Jan 2023

Keywords

Hard coatings
PECVD
Wear-resistance

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10.1016/j.triboint.2022.108137

Cite this

@article{a743de303bde4364ba551b43177b6267,

title = "Plasma-enhanced chemical vapor deposition of TiB2 and TiBN hard coatings using BBr3",

abstract = "In this work, titanium nitride, titanium boro-nitride and titanium di boride coatings were deposited on H13 steel using plasma-enhanced chemical vapor deposition from BBr 3, TiCl 4, N 2, H 2 and Ar reactants at 500 °C. The results showed that the TiBN coating has a crystalline microstructure composed of both TiN and TiB 2 phases. The calculated crystalline size of the TiN, TiBN and TiB 2 coatings was about 13, 10 and 32 nm, respectively. The thickness of TiN, TiBN and TiB 2 coatings was about 2.5, 0.3 and 0.5 µm, respectively. The hardness of TiN, TiBN and TiB 2 films was 15.74, 19.44 and 23.47 GPa, respectively. The highest wear resistance was achieved for the TiB 2 coating thanks to its high hardness and good adhesion strength.",

keywords = "Hard coatings, PECVD, Wear-resistance",

author = "Farid Movassagh-Alanagh and Amir Abdollah-zadeh and {Alizadeh Zolbin}, Maryam and Narguess Nemati and Ramin Aghababaei",

year = "2023",

month = jan,

doi = "10.1016/j.triboint.2022.108137",

language = "English",

volume = "179",

journal = "Tribology International",

issn = "0301-679X",

publisher = "Elsevier Inc.",

}

Plasma-enhanced chemical vapor deposition of TiB₂ and TiBN hard coatings using BBr₃. / Movassagh-Alanagh, Farid ; Abdollah-zadeh, Amir; Alizadeh Zolbin, Maryam et al.
In: Tribology International, Vol. 179, 108137, 01.2023.

Research output: Contribution to journal/Conference contribution in journal/Contribution to newspaper › Journal article › Research › peer-review

TY - JOUR

T1 - Plasma-enhanced chemical vapor deposition of TiB2 and TiBN hard coatings using BBr3

AU - Movassagh-Alanagh, Farid

AU - Abdollah-zadeh, Amir

AU - Alizadeh Zolbin, Maryam

AU - Nemati, Narguess

AU - Aghababaei, Ramin

PY - 2023/1

Y1 - 2023/1

N2 - In this work, titanium nitride, titanium boro-nitride and titanium di boride coatings were deposited on H13 steel using plasma-enhanced chemical vapor deposition from BBr 3, TiCl 4, N 2, H 2 and Ar reactants at 500 °C. The results showed that the TiBN coating has a crystalline microstructure composed of both TiN and TiB 2 phases. The calculated crystalline size of the TiN, TiBN and TiB 2 coatings was about 13, 10 and 32 nm, respectively. The thickness of TiN, TiBN and TiB 2 coatings was about 2.5, 0.3 and 0.5 µm, respectively. The hardness of TiN, TiBN and TiB 2 films was 15.74, 19.44 and 23.47 GPa, respectively. The highest wear resistance was achieved for the TiB 2 coating thanks to its high hardness and good adhesion strength.

AB - In this work, titanium nitride, titanium boro-nitride and titanium di boride coatings were deposited on H13 steel using plasma-enhanced chemical vapor deposition from BBr 3, TiCl 4, N 2, H 2 and Ar reactants at 500 °C. The results showed that the TiBN coating has a crystalline microstructure composed of both TiN and TiB 2 phases. The calculated crystalline size of the TiN, TiBN and TiB 2 coatings was about 13, 10 and 32 nm, respectively. The thickness of TiN, TiBN and TiB 2 coatings was about 2.5, 0.3 and 0.5 µm, respectively. The hardness of TiN, TiBN and TiB 2 films was 15.74, 19.44 and 23.47 GPa, respectively. The highest wear resistance was achieved for the TiB 2 coating thanks to its high hardness and good adhesion strength.

KW - Hard coatings

KW - PECVD

KW - Wear-resistance

U2 - 10.1016/j.triboint.2022.108137

DO - 10.1016/j.triboint.2022.108137

M3 - Journal article

SN - 0301-679X

VL - 179

JO - Tribology International

JF - Tribology International

M1 - 108137