Optomechanical squeeze film sensors for absolute saturation vapor pressure measurements

Robin Vinther Nielsen; Mohsen Salimi; Sepideh Naserbakht; Andreas Næsby; John Erik Vad Andersen; Henrik B. Pedersen; Aurelien Romain Dantan

doi:10.1109/PGC60057.2023.10344240

Optomechanical squeeze film sensors for absolute saturation vapor pressure measurements

Robin Vinther Nielsen, Mohsen Salimi, Sepideh Naserbakht, Andreas Næsby, John Erik Vad Andersen, Henrik B. Pedersen, Aurelien Romain Dantan

Department of Physics and Astronomy

Research output: Contribution to book/anthology/report/proceeding › Article in proceedings › Research

Abstract

In this work we report on the realization of micromechanical squeeze film pressure sensors based on SiN membrane sandwiches and the construction and calibration of a novel instrument for the direct and absolute determination of the saturation vapor pressures of low-volatile substances.

Original language	English
Title of host publication	2023 Photonics Global Conference (PGC)
Number of pages	4
Publisher	IEEE
Publication date	Aug 2023
Pages	81-84
ISBN (Electronic)	979-8-3503-1837-1, 979-8-3503-1836-4, 979-8-3503-1838-8
DOIs	https://doi.org/10.1109/PGC60057.2023.10344240
Publication status	Published - Aug 2023

Keywords

Pressure sensors
saturation vapor pressure
squeeze film effect

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10.1109/PGC60057.2023.10344240

Cite this

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title = "Optomechanical squeeze film sensors for absolute saturation vapor pressure measurements",

abstract = "In this work we report on the realization of micromechanical squeeze film pressure sensors based on SiN membrane sandwiches and the construction and calibration of a novel instrument for the direct and absolute determination of the saturation vapor pressures of low-volatile substances.",

keywords = "Pressure sensors, saturation vapor pressure, squeeze film effect",

author = "Nielsen, {Robin Vinther} and Mohsen Salimi and Sepideh Naserbakht and Andreas N{\ae}sby and Andersen, {John Erik Vad} and Pedersen, {Henrik B.} and Dantan, {Aurelien Romain}",

year = "2023",

month = aug,

doi = "10.1109/PGC60057.2023.10344240",

language = "English",

pages = "81--84",

booktitle = "2023 Photonics Global Conference (PGC)",

publisher = "IEEE",

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TY - GEN

T1 - Optomechanical squeeze film sensors for absolute saturation vapor pressure measurements

AU - Nielsen, Robin Vinther

AU - Salimi, Mohsen

AU - Naserbakht, Sepideh

AU - Næsby, Andreas

AU - Andersen, John Erik Vad

AU - Pedersen, Henrik B.

AU - Dantan, Aurelien Romain

PY - 2023/8

Y1 - 2023/8

N2 - In this work we report on the realization of micromechanical squeeze film pressure sensors based on SiN membrane sandwiches and the construction and calibration of a novel instrument for the direct and absolute determination of the saturation vapor pressures of low-volatile substances.

AB - In this work we report on the realization of micromechanical squeeze film pressure sensors based on SiN membrane sandwiches and the construction and calibration of a novel instrument for the direct and absolute determination of the saturation vapor pressures of low-volatile substances.

KW - Pressure sensors

KW - saturation vapor pressure

KW - squeeze film effect

UR - http://www.scopus.com/inward/record.url?scp=85182267645&partnerID=8YFLogxK

U2 - 10.1109/PGC60057.2023.10344240

DO - 10.1109/PGC60057.2023.10344240

M3 - Article in proceedings

SP - 81

EP - 84

BT - 2023 Photonics Global Conference (PGC)

PB - IEEE

ER -

Optomechanical squeeze film sensors for absolute saturation vapor pressure measurements

Abstract

Keywords

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