TY - JOUR
T1 - Nanofabrication of nanostructure lattices
T2 - from high-quality large patterns to precise hybrid units
AU - Ma, Rui
AU - Zhang, Xiaodan
AU - Sutherland, Duncan
AU - Bochenkov, Vladimir
AU - Deng, Shikai
N1 - Publisher Copyright:
© 2024 The Author(s). Published by IOP Publishing Ltd on behalf of the IMMT.
PY - 2024/12
Y1 - 2024/12
N2 - Highlights Pattern generation methods for nanostructure lattices e.g. direct writing, self-assembly, controllable deposition, and nanoimprint are summarized. Recent improvements in the control of lattices with integrated and multifunctional units are highlighted. Future studies on the fabrication of nanostructure lattices with dynamic materials, 3D lattice structures, and hybrid units are introduced.
AB - Highlights Pattern generation methods for nanostructure lattices e.g. direct writing, self-assembly, controllable deposition, and nanoimprint are summarized. Recent improvements in the control of lattices with integrated and multifunctional units are highlighted. Future studies on the fabrication of nanostructure lattices with dynamic materials, 3D lattice structures, and hybrid units are introduced.
KW - hybrid material structures
KW - large-area fabrication
KW - metasurfaces
KW - nanofabrication
KW - nanostructure lattices
UR - http://www.scopus.com/inward/record.url?scp=85201369599&partnerID=8YFLogxK
U2 - 10.1088/2631-7990/ad6838
DO - 10.1088/2631-7990/ad6838
M3 - Review
AN - SCOPUS:85201369599
SN - 2631-8644
VL - 6
JO - International Journal of Extreme Manufacturing
JF - International Journal of Extreme Manufacturing
IS - 6
M1 - 062004
ER -