Low surface damage dry etched black silicon

Maksym M. Plakhotnyuk*, Maria Gaudig, Rasmus Schmidt Davidsen, Jonas Michael Lindhard, Jens Hirsch, Dominik Lausch, Michael Stenbæk Schmidt, Eugen Stamate, Ole Hansen

*Corresponding author for this work

Research output: Contribution to journal/Conference contribution in journal/Contribution to newspaperJournal articleResearchpeer-review

Original languageEnglish
JournalJournal of Applied Physics
Volume122
Issue14
ISSN0021-8979
DOIs
Publication statusPublished - 2017

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