Integration of GaAs waveguides on a silicon substrate for quantum photonic circuits

Atefeh Shadmani*, Rodrigo A. Thomas, Zhe Liu, Camille Papon, Martijn J.R. Heck, Nicolas Volet, Sven Scholz, Andreas D. Wieck, Arne Ludwig, Peter Lodahl, Leonardo Midolo

*Corresponding author for this work

Research output: Contribution to journal/Conference contribution in journal/Contribution to newspaperJournal articleResearchpeer-review


We report a method for integrating GaAs waveguide circuits containing self-assembled quantum dots on a Si/SiO2 wafer, using die-to-wafer bonding. The large refractive-index contrast between GaAs and SiO2 enables fabricating single-mode waveguides without compromising the photon-emitter coupling. Anti-bunched emission from individual quantum dots is observed, along with a waveguide propagation loss <7 dB/mm, which is comparable with the performance of suspended GaAs circuits. These results enable the integration of quantum emitters with different material platforms, towards the realization of scalable quantum photonic integrated circuits.

Original languageEnglish
JournalOptics Express
Pages (from-to)37595-37602
Number of pages8
Publication statusPublished - Oct 2022


Dive into the research topics of 'Integration of GaAs waveguides on a silicon substrate for quantum photonic circuits'. Together they form a unique fingerprint.

Cite this