Integrated dielectric waveguide and semiconductor layer and method therefor

J Bauters (Inventor), D J Blumenthal (Inventor), J Bovington (Inventor), J E Bowers (Inventor), M L Davenport (Inventor), Martijn Heck (Inventor)

Research output: Patent

Original languageEnglish
Patent number2014047443
Country/TerritoryUnited States
Priority date21/09/2012
Publication statusPublished - 2014
Externally publishedYes

Cite this