Experimental Testing and Performance Comparisons between V- and Z-shaped Electrothermal Microactuators

Zhuo Zhang, Yueqing Yu, Xuping Zhang

    Research output: Contribution to book/anthology/report/proceedingArticle in proceedingsResearchpeer-review

    Abstract

    This work presents comprehensive experimental studies on performance comparisons between V- and Z-shaped electrothermal microactuators. The V- and Z-shaped electrothermal microactuators are fabricated by depositing a copper layer on each side of SU-8 photoresist. The steady-state output displacement and dynamic responses of V- and Z-shaped actuators are compared based on experimental testing. In addition, a unique actuator with mixed V- and Z-shaped beams is designed and tested to further compare the force output capabilities of the V- and Z-shaped beams. Experimental data is acquired based on image processing, and a parallel spring model is proposed to analyze the experimental results. Comprehensive discussions are given to provide insights and guidance on the selection and design of the V- and Z-shaped electrothermal micoactuators.

    Original languageEnglish
    Title of host publicationProceedings of 2018 IEEE International Conference on Mechatronics and Automation, ICMA 2018 : ICMA
    Number of pages6
    Volume2018
    PublisherIEEE
    Publication date2018
    Pages521-526
    Article number8484473
    ISBN (Print)978-1-5386-6074-4
    ISBN (Electronic)978-1-5386-6075-1
    DOIs
    Publication statusPublished - 2018
    EventThe 2018 IEEE International Conference on Mechatronics and Automation : ICMA 2018 - Changchun, China
    Duration: 5 Aug 20188 Aug 2018

    Conference

    ConferenceThe 2018 IEEE International Conference on Mechatronics and Automation
    Country/TerritoryChina
    CityChangchun
    Period05/08/201808/08/2018

    Keywords

    • Electrothermal microactuator
    • Experimental testing
    • Performance comparison
    • V-shaped beam
    • Z-shaped beam

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