Dynamic Electro-thermal Modeling of V- and Z-shaped Electrothermal Microactuator

TY - GEN

T1 - Dynamic Electro-thermal Modeling of V- and Z-shaped Electrothermal Microactuator

AU - Zhang, Zhuo

AU - Yu, Yueqing

AU - Liu, Xinyu

AU - Zhang, Xuping

N1 - E-ISSN: 2152-744X

PY - 2016

Y1 - 2016

N2 - This paper presents a dynamic electro-thermal model for the V- and Z-shaped electrothermal microactuator for the first time. The model predicts the dynamic temperature responses of the actuator operating in vacuum conditions with constant input voltage applied at both ends. Dynamics of the temperature distribution are established, and the exact solution of the hybrid partial differential equation (PDE) is obtained to describe the electro-thermal behavior for each segment of the actuator. To solve the PDE, the final temperature responses are intentionally decomposed into two parts, i.e., the steady-state and transient responses. In addition to the initial and boundary conditions, continuity conditions that describe the temperature and heat flux density between adjacent segments of the actuator are employed to solve the hybrid PDE. The validation of the model is conducted by finite-element simulations using ANSYS software (version 14.0). The analytical results based on the proposed model well agree with the numerical results with ANSYS analysis in terms of predictions on both steady-state and transient responses. Along with the line-shaped beam model, this proposed model serves as the first sub-model in establishing the complete dynamic electro-thermal-mechanical model for the V- and Z-shaped actuators. The developed modeling method paves the way in improving the design and optimizing the dimensions of the actuator in achieving better static and dynamic performances.

AB - This paper presents a dynamic electro-thermal model for the V- and Z-shaped electrothermal microactuator for the first time. The model predicts the dynamic temperature responses of the actuator operating in vacuum conditions with constant input voltage applied at both ends. Dynamics of the temperature distribution are established, and the exact solution of the hybrid partial differential equation (PDE) is obtained to describe the electro-thermal behavior for each segment of the actuator. To solve the PDE, the final temperature responses are intentionally decomposed into two parts, i.e., the steady-state and transient responses. In addition to the initial and boundary conditions, continuity conditions that describe the temperature and heat flux density between adjacent segments of the actuator are employed to solve the hybrid PDE. The validation of the model is conducted by finite-element simulations using ANSYS software (version 14.0). The analytical results based on the proposed model well agree with the numerical results with ANSYS analysis in terms of predictions on both steady-state and transient responses. Along with the line-shaped beam model, this proposed model serves as the first sub-model in establishing the complete dynamic electro-thermal-mechanical model for the V- and Z-shaped actuators. The developed modeling method paves the way in improving the design and optimizing the dimensions of the actuator in achieving better static and dynamic performances.

KW - Dynamic modeling

KW - V-shaped beam

KW - Z-shaped beam

KW - electro-thermal

KW - microactuator

UR - http://www.scopus.com/inward/record.url?scp=84991225117&partnerID=8YFLogxK

U2 - 10.1109/ICMA.2016.7558680

DO - 10.1109/ICMA.2016.7558680

M3 - Article in proceedings

SP - 890

EP - 895

BT - 2016 IEEE International Conference on Mechatronics and Automation, IEEE ICMA 2016

PB - IEEE

T2 - Mechatronics and Automation (ICMA) 2016

Y2 - 7 August 2016 through 10 August 2016

ER -