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Determination of thermoelectric properties from micro four-point probe measurements

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DOI

  • Benny Guralnik, Technical University of Denmark, CAPRES—a KLA company, Diplomvej 373, 2800 Kgs. Lyngby, Denmark
  • Ole Hansen, Technical University of Denmark, Denmark
  • Andreas R. Stilling-Andersen, Technical University of Denmark
  • ,
  • Søren E. Hansen, Technical University of Denmark
  • ,
  • Kasper Borup
  • Besira M. Mihiretie, Hot Disk AB
  • ,
  • Braulio Beltrán-Pitarch, Technical University of Denmark, CAPRES—a KLA company, Diplomvej 373, 2800 Kgs. Lyngby
  • ,
  • Henrik H. Henrichsen, CAPRES—a KLA company, Diplomvej 373, 2800 Kgs. Lyngby
  • ,
  • Rong Lin, CAPRES—a KLA company, Diplomvej 373, 2800 Kgs. Lyngby
  • ,
  • Lior Shiv, CAPRES—a KLA company, Diplomvej 373, 2800 Kgs. Lyngby
  • ,
  • Bo Brummerstedt Iversen
  • Peter F. Nielsen, CAPRES—a KLA company, Diplomvej 373, 2800 Kgs. Lyngby
  • ,
  • Dirch H. Petersen, Technical University of Denmark
Micro four-point probing is a branch of electrical metrology where electrical (and electromagnetic) properties of charge carriers such as conductance, mobility, and tunneling magnetoresistance can be accurately and precisely determined at the µm scale and below. Here, we propose and demonstrate a novel application of micro four-point probe (M4PP) aimed at quantifying the thermoelectric properties of a sample. Specifically, we show that for an AC current passing through a bulk material at a low angular frequency ω, the voltage drop across the sensing electrodes at 2ω is to first order proportional to the ratio (α/κ) of its Seebeck coefficient (α) to its thermal conductivity (κ). Verified by numerical simulations, our analytic theory is then put into practice on a suite of p- and n-type bulk semiconductors (Si, Ge, and BiTe). The M4PP estimates of the Seebeck coefficient in these materials are characterized both by high accuracy and precision, suggesting a novel in-situ metrology of thermoelectric properties at the µm scale.
Original languageEnglish
Article number125001
JournalMeasurement Science and Technology
Volume33
Issue12
Number of pages11
ISSN0957-0233
DOIs
Publication statusPublished - Dec 2022

    Research areas

  • 2 ω method, Seebeck coefficient, micro four-point probe, self-heating effect

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