An Equivalent Line-beam Vibration Model for Frequency Analysis of the V- and Z-shaped Electrothermal Microactuators

Dongming Tian, Zhuo Zhang, Yueqing Yu, Xuping Zhang

    Research output: Contribution to book/anthology/report/proceedingArticle in proceedingsResearchpeer-review

    Abstract

    This paper presents an equivalent analytical model for vibration analysis of the V-and Z-shaped electrothermal microactuators. Considering the geometric analogy between the line-shaped and V/Z-shaped beam, the analytical model for vibration of the line-shaped beam that characterize the V-and Z-shaped beams is established first. The line-shaped beam provides completely the same boundary conditions and geometric dimensions (beam span, width, thickness, and shuttle dimensions) as the V-and Z-shaped beams, except for the inclined angle and the middle step beam, namely the stiffness. By writing the frequency of the line-shaped beam as a product of its stiffness and the term determined by the boundary conditions, the first-order natural frequency of the V-and Z-shaped beams can be derived by substituting their stiffness into the frequency expression. As the movement of the shuttle (i.e., the stiffness) does not contribute higher order mode shapes, corresponding higher-order natural frequencies of the V-and Z-shaped beams can be predicted directly with the line-shaped beam model. Verification of the vibration model for the line-shaped beam as well as the equivalent approach to predicting the natural frequencies of the V-and Z-shaped beams was conducted by comparing the results with finite-element simulation data using ANSYS software. Results show that, apart from some inaccuracies in predicting the higher order frequencies for the Z-shaped beam, this equivalent approach is accurate for the first-order frequency of the V-and Z-shaped beam as well as the higher order frequencies for the V-shaped beam. With this simple equivalent model, it is possible to investigate the frequency characteristics of the two typical beams thus paving the way for control and improving the design of the V-and Z-shaped electrothermal microactuators.

    Original languageEnglish
    Title of host publication2017 2nd International Conference on Advanced Robotics and Mechatronics, ICARM 2017 : (ICARM)
    Number of pages6
    PublisherIEEE
    Publication date2017
    Pages456-461
    ISBN (Print)978-1-5386-3261-1
    ISBN (Electronic)978-1-5386-3260-4
    DOIs
    Publication statusPublished - 2017
    EventIEEE International Conference on Advanced Robotics and Mechatronics - Hefei, China
    Duration: 29 Aug 201731 Aug 2017
    http://www.ieee-arm.org/

    Conference

    ConferenceIEEE International Conference on Advanced Robotics and Mechatronics
    Country/TerritoryChina
    CityHefei
    Period29/08/201731/08/2017
    Internet address

    Keywords

    • Electrothermal Actuator
    • Natural Frequency
    • V-shaped beam
    • Vibration Analysis
    • Z-shaped beam

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