Vibration Modes and Parameter Analysis of V-shaped Electrothermal Microactuators

TY - JOUR

T1 - Vibration Modes and Parameter Analysis of V-shaped Electrothermal Microactuators

AU - Zhang, Zhuo

AU - Yu, Yueqing

AU - Zhang, Xuping

PY - 2018

Y1 - 2018

N2 - Comprehensive analysis on the modal characteristics of V-shaped electrothermal microactuators is presented in this paper for the first time. Considering the unique geometric characteristics of the V-shaped beam, that is, two inclined beams supporting a movable shuttle, both the lateral and longitudinal deflections are taken into account in the modal analysis. Boundary and continuity conditions are employed to obtain the frequency equation. Natural frequencies are then obtained by solving the frequency equation. Mode shapes corresponding to their natural frequencies are also calculated analytically. The theoretical modal analysis is verified with the finite element analysis using ANSYS software. Based on the model analysis, this paper further investigates the relationship between natural frequencies and the volume scaling of the V-shaped beam. Finally, comprehensive parametric studies in terms of material properties and structural dimensions are conducted to provide insights and guidance in designing the V-shaped beam electrothermal microactuators.

AB - Comprehensive analysis on the modal characteristics of V-shaped electrothermal microactuators is presented in this paper for the first time. Considering the unique geometric characteristics of the V-shaped beam, that is, two inclined beams supporting a movable shuttle, both the lateral and longitudinal deflections are taken into account in the modal analysis. Boundary and continuity conditions are employed to obtain the frequency equation. Natural frequencies are then obtained by solving the frequency equation. Mode shapes corresponding to their natural frequencies are also calculated analytically. The theoretical modal analysis is verified with the finite element analysis using ANSYS software. Based on the model analysis, this paper further investigates the relationship between natural frequencies and the volume scaling of the V-shaped beam. Finally, comprehensive parametric studies in terms of material properties and structural dimensions are conducted to provide insights and guidance in designing the V-shaped beam electrothermal microactuators.

U2 - 10.1155/2018/1080652

DO - 10.1155/2018/1080652

M3 - Journal article

SN - 1070-9622

VL - 2018

JO - Shock and Vibration

JF - Shock and Vibration

M1 - 1080652

ER -