Tunable terahertz filter and modulator based on electrostatic MEMS reconfigurable SRR array

Zhengli Han, Kenta Kohno, Hiroyuki Fujita, Kazuhiko Hirakawa, Hiroshi Toshiyoshi

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Abstract

This paper demonstrates a tunable terahertz (THz) filter and a modulator based on an electrostatic micro electro mechanical systems (MEMS) reconfigurable split ring resonator (SRR) array. The device uses tunable metamaterial concept in which an RF-MEMS (radio frequency-MEMS) capacitor is embedded in each SRR unit cell to tune the electromagnetic resonant frequency. By utilizing THz time domain spectroscopy (THz-TDS) measurement and through the voltage actuation we have controlled the THz transmission of the metamaterial device and thus demonstrated a tunable filter. Since the low loss material of fused quartz is used as the substrate the device shows a high contrast ratio THz switch at a given frequency by controlling the capacitance of the RF-MEMS capacitor. The dynamic performance of the switch i.e. the modulation ability is also characterized by THz-TDS. The measurement results show up to 2 kHz of the modulation speed with the TDS operated. The device is developed by the surface micromachining process with three photolithography steps.

OriginalsprogEngelsk
Artikelnummer6975029
TidsskriftIEEE Journal of Selected Topics in Quantum Electronics
Vol/bind21
Nummer4
Sider (fra-til)114-122
Antal sider9
ISSN1077-260X
DOI
StatusUdgivet - 1 jul. 2015
Udgivet eksterntJa

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