Abstract
This paper demonstrates a tunable terahertz (THz) filter and a modulator based on an electrostatic micro electro mechanical systems (MEMS) reconfigurable split ring resonator (SRR) array. The device uses tunable metamaterial concept in which an RF-MEMS (radio frequency-MEMS) capacitor is embedded in each SRR unit cell to tune the electromagnetic resonant frequency. By utilizing THz time domain spectroscopy (THz-TDS) measurement and through the voltage actuation we have controlled the THz transmission of the metamaterial device and thus demonstrated a tunable filter. Since the low loss material of fused quartz is used as the substrate the device shows a high contrast ratio THz switch at a given frequency by controlling the capacitance of the RF-MEMS capacitor. The dynamic performance of the switch i.e. the modulation ability is also characterized by THz-TDS. The measurement results show up to 2 kHz of the modulation speed with the TDS operated. The device is developed by the surface micromachining process with three photolithography steps.
Originalsprog | Engelsk |
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Artikelnummer | 6975029 |
Tidsskrift | IEEE Journal of Selected Topics in Quantum Electronics |
Vol/bind | 21 |
Nummer | 4 |
Sider (fra-til) | 114-122 |
Antal sider | 9 |
ISSN | 1077-260X |
DOI | |
Status | Udgivet - 1 jul. 2015 |
Udgivet eksternt | Ja |