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Suspended subwavelength gratings for optical processing and optomechanics

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Suspended subwavelength gratings for optical processing and optomechanics. / Darki, Ali A.; Parthenopoulos, Alexios; Jeppesen, Bjarke R.; Nygaard, Jens V.; Dantan, Aurélien.

High Contrast Metastructures X. red. / Connie J. Chang-Hasnain; Jonathan A. Fan; Weimin Zhou. SPIE - International Society for Optical Engineering, 2021. 116951N (Proceedings of SPIE - The International Society for Optical Engineering, Bind 11695).

Publikation: Bidrag til bog/antologi/rapport/proceedingKonferencebidrag i proceedingsForskningpeer review

Harvard

Darki, AA, Parthenopoulos, A, Jeppesen, BR, Nygaard, JV & Dantan, A 2021, Suspended subwavelength gratings for optical processing and optomechanics. i CJ Chang-Hasnain, JA Fan & W Zhou (red), High Contrast Metastructures X., 116951N, SPIE - International Society for Optical Engineering, Proceedings of SPIE - The International Society for Optical Engineering, bind 11695, High Contrast Metastructures X 2021, Virtual, Online, USA, 06/03/2021. https://doi.org/10.1117/12.2585455

APA

Darki, A. A., Parthenopoulos, A., Jeppesen, B. R., Nygaard, J. V., & Dantan, A. (2021). Suspended subwavelength gratings for optical processing and optomechanics. I C. J. Chang-Hasnain, J. A. Fan, & W. Zhou (red.), High Contrast Metastructures X [116951N] SPIE - International Society for Optical Engineering. Proceedings of SPIE - The International Society for Optical Engineering Bind 11695 https://doi.org/10.1117/12.2585455

CBE

Darki AA, Parthenopoulos A, Jeppesen BR, Nygaard JV, Dantan A. 2021. Suspended subwavelength gratings for optical processing and optomechanics. Chang-Hasnain CJ, Fan JA, Zhou W, red. I High Contrast Metastructures X. SPIE - International Society for Optical Engineering. Article 116951N. (Proceedings of SPIE - The International Society for Optical Engineering, Bind 11695). https://doi.org/10.1117/12.2585455

MLA

Darki, Ali A. o.a.. "Suspended subwavelength gratings for optical processing and optomechanics"., Chang-Hasnain, Connie J. Fan, Jonathan A. Zhou, Weimin (red.). High Contrast Metastructures X. SPIE - International Society for Optical Engineering. (Proceedings of SPIE - The International Society for Optical Engineering, Bind 11695). 2021. https://doi.org/10.1117/12.2585455

Vancouver

Darki AA, Parthenopoulos A, Jeppesen BR, Nygaard JV, Dantan A. Suspended subwavelength gratings for optical processing and optomechanics. I Chang-Hasnain CJ, Fan JA, Zhou W, red., High Contrast Metastructures X. SPIE - International Society for Optical Engineering. 2021. 116951N. (Proceedings of SPIE - The International Society for Optical Engineering, Bind 11695). https://doi.org/10.1117/12.2585455

Author

Darki, Ali A. ; Parthenopoulos, Alexios ; Jeppesen, Bjarke R. ; Nygaard, Jens V. ; Dantan, Aurélien. / Suspended subwavelength gratings for optical processing and optomechanics. High Contrast Metastructures X. red. / Connie J. Chang-Hasnain ; Jonathan A. Fan ; Weimin Zhou. SPIE - International Society for Optical Engineering, 2021. (Proceedings of SPIE - The International Society for Optical Engineering, Bind 11695).

Bibtex

@inproceedings{52a044f56f554607b05ebc626cfbd8ac,
title = "Suspended subwavelength gratings for optical processing and optomechanics",
abstract = "Owing to their high optical and mechanical quality suspended silicon nitride thin films are widely used for photonics and sensing applications. We discuss the fabrication and characterization of highly reflective one- dimensional subwavelength gratings patterned on commercial high-tensile stress Si3N4 membranes. Their non- invasive structural characterization using Atomic Force Microscopy provides detailed information on both the grating transverse profile and the deflection of the films after etching, which are compared with optical measurements and mechanical simulations, respectively. We then apply these ultrathin, low-loss optical components to optical spatial differentiation and demonstrate high quality first- and second-order spatial differentiation of the transverse profile of a Gaussian beam. ",
keywords = "Atomic force microscopy, Membrane deflection, Optical spatial differentiation, Subwavelength grating",
author = "Darki, {Ali A.} and Alexios Parthenopoulos and Jeppesen, {Bjarke R.} and Nygaard, {Jens V.} and Aur{\'e}lien Dantan",
note = "Publisher Copyright: {\textcopyright} 2021 SPIE.; High Contrast Metastructures X 2021 ; Conference date: 06-03-2021 Through 11-03-2021",
year = "2021",
doi = "10.1117/12.2585455",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE - International Society for Optical Engineering",
editor = "Chang-Hasnain, {Connie J.} and Fan, {Jonathan A.} and Weimin Zhou",
booktitle = "High Contrast Metastructures X",
address = "United States",

}

RIS

TY - GEN

T1 - Suspended subwavelength gratings for optical processing and optomechanics

AU - Darki, Ali A.

AU - Parthenopoulos, Alexios

AU - Jeppesen, Bjarke R.

AU - Nygaard, Jens V.

AU - Dantan, Aurélien

N1 - Publisher Copyright: © 2021 SPIE.

PY - 2021

Y1 - 2021

N2 - Owing to their high optical and mechanical quality suspended silicon nitride thin films are widely used for photonics and sensing applications. We discuss the fabrication and characterization of highly reflective one- dimensional subwavelength gratings patterned on commercial high-tensile stress Si3N4 membranes. Their non- invasive structural characterization using Atomic Force Microscopy provides detailed information on both the grating transverse profile and the deflection of the films after etching, which are compared with optical measurements and mechanical simulations, respectively. We then apply these ultrathin, low-loss optical components to optical spatial differentiation and demonstrate high quality first- and second-order spatial differentiation of the transverse profile of a Gaussian beam.

AB - Owing to their high optical and mechanical quality suspended silicon nitride thin films are widely used for photonics and sensing applications. We discuss the fabrication and characterization of highly reflective one- dimensional subwavelength gratings patterned on commercial high-tensile stress Si3N4 membranes. Their non- invasive structural characterization using Atomic Force Microscopy provides detailed information on both the grating transverse profile and the deflection of the films after etching, which are compared with optical measurements and mechanical simulations, respectively. We then apply these ultrathin, low-loss optical components to optical spatial differentiation and demonstrate high quality first- and second-order spatial differentiation of the transverse profile of a Gaussian beam.

KW - Atomic force microscopy

KW - Membrane deflection

KW - Optical spatial differentiation

KW - Subwavelength grating

UR - http://www.scopus.com/inward/record.url?scp=85106187366&partnerID=8YFLogxK

U2 - 10.1117/12.2585455

DO - 10.1117/12.2585455

M3 - Article in proceedings

AN - SCOPUS:85106187366

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - High Contrast Metastructures X

A2 - Chang-Hasnain, Connie J.

A2 - Fan, Jonathan A.

A2 - Zhou, Weimin

PB - SPIE - International Society for Optical Engineering

T2 - High Contrast Metastructures X 2021

Y2 - 6 March 2021 through 11 March 2021

ER -