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Suspended subwavelength gratings for optical processing and optomechanics
Publikation: Bidrag til bog/antologi/rapport/proceeding › Konferencebidrag i proceedings › Forskning › peer review
DOI
- https://doi.org/10.1117/12.2585455
Forlagets udgivne version
- Ali A. Darki
- Alexios Parthenopoulos ,
- Bjarke R. Jeppesen
- Jens V. Nygaard
- Aurélien Dantan
Owing to their high optical and mechanical quality suspended silicon nitride thin films are widely used for photonics and sensing applications. We discuss the fabrication and characterization of highly reflective one- dimensional subwavelength gratings patterned on commercial high-tensile stress Si3N4 membranes. Their non- invasive structural characterization using Atomic Force Microscopy provides detailed information on both the grating transverse profile and the deflection of the films after etching, which are compared with optical measurements and mechanical simulations, respectively. We then apply these ultrathin, low-loss optical components to optical spatial differentiation and demonstrate high quality first- and second-order spatial differentiation of the transverse profile of a Gaussian beam.
| Originalsprog | Engelsk |
|---|---|
| Titel | High Contrast Metastructures X |
| Redaktører | Connie J. Chang-Hasnain, Jonathan A. Fan, Weimin Zhou |
| Forlag | SPIE - International Society for Optical Engineering |
| Udgivelsesår | 2021 |
| Artikelnummer | 116951N |
| ISBN (Elektronisk) | 9781510642256 |
| DOI | |
| Status | Udgivet - 2021 |
| Begivenhed | High Contrast Metastructures X 2021 - Virtual, Online, USA Varighed: 6 mar. 2021 → 11 mar. 2021 |
Konference
| Konference | High Contrast Metastructures X 2021 |
|---|---|
| Land | USA |
| By | Virtual, Online |
| Periode | 06/03/2021 → 11/03/2021 |
| Sponsor | The Society of Photo-Optical Instrumentation Engineers (SPIE) |
| Serietitel | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Vol/bind | 11695 |
| ISSN | 0277-786X |
Bibliografisk note
Funding Information:
We acknowledge financial support from Independent Research Fund Denmark as well as from the Danish Hydrocarbon research and Technology Center for finding software through project FL 15a, AWF.2.C.03.
Publisher Copyright:
© 2021 SPIE.
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