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Suspended subwavelength gratings for optical processing and optomechanics

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DOI

Owing to their high optical and mechanical quality suspended silicon nitride thin films are widely used for photonics and sensing applications. We discuss the fabrication and characterization of highly reflective one- dimensional subwavelength gratings patterned on commercial high-tensile stress Si3N4 membranes. Their non- invasive structural characterization using Atomic Force Microscopy provides detailed information on both the grating transverse profile and the deflection of the films after etching, which are compared with optical measurements and mechanical simulations, respectively. We then apply these ultrathin, low-loss optical components to optical spatial differentiation and demonstrate high quality first- and second-order spatial differentiation of the transverse profile of a Gaussian beam.

OriginalsprogEngelsk
TitelHigh Contrast Metastructures X
RedaktørerConnie J. Chang-Hasnain, Jonathan A. Fan, Weimin Zhou
ForlagSPIE - International Society for Optical Engineering
Udgivelsesår2021
Artikelnummer116951N
ISBN (Elektronisk)9781510642256
DOI
StatusUdgivet - 2021
BegivenhedHigh Contrast Metastructures X 2021 - Virtual, Online, USA
Varighed: 6 mar. 202111 mar. 2021

Konference

KonferenceHigh Contrast Metastructures X 2021
LandUSA
ByVirtual, Online
Periode06/03/202111/03/2021
SponsorThe Society of Photo-Optical Instrumentation Engineers (SPIE)
SerietitelProceedings of SPIE - The International Society for Optical Engineering
Vol/bind11695
ISSN0277-786X

Bibliografisk note

Funding Information:
We acknowledge financial support from Independent Research Fund Denmark as well as from the Danish Hydrocarbon research and Technology Center for finding software through project FL 15a, AWF.2.C.03.

Publisher Copyright:
© 2021 SPIE.

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