Suspended silicon nitride thin films with enhanced and electrically tunable reflectivity

Bhagya Nair; Andreas Næsby; Bjarke Rolighed Jeppesen; Aurelien Romain Dantan

doi:10.1088/1402-4896/ab3d6f

Suspended silicon nitride thin films with enhanced and electrically tunable reflectivity

Bhagya Nair, Andreas Næsby, Bjarke Rolighed Jeppesen, Aurelien Romain Dantan

Publikation: Bidrag til tidsskrift/Konferencebidrag i tidsskrift /Bidrag til avis › Tidsskriftartikel › Forskning › peer review

14 Citationer (Scopus)

Abstract

We report on the realization of silicon nitride membranes with enhanced and electrically tunable reflectivity. A subwavelength one-dimensional grating is directly patterned on a suspended 200 nm thick, high stress commercial film using electron beam lithography. A Fano resonance is observed in the transmission spectrum of TM polarized light impinging on the membrane at normal incidence, leading to an increase in its reflectivity from 10% to 78% at 937 nm. The observed spectrum is compared to the results of rigorous coupled wave analysis simulations based on measurements of the grating transverse profile through localized cuts of the suspended film with a Focused Ion Beam. By mounting the membrane chip on a ring piezoelectric transducer and applying a compressive force to the substrate we subsequently observe a shift of the transmission spectrum by 0.23 nm.

Originalsprog	Engelsk
Artikelnummer	125013
Tidsskrift	Physica Scripta
Vol/bind	94
Nummer	12
Antal sider	6
ISSN	0031-8949
DOI	https://doi.org/10.1088/1402-4896/ab3d6f
Status	Udgivet - sep. 2019

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10.1088/1402-4896/ab3d6f

https://arxiv.org/pdf/1809.08790.pdf

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http://www.scopus.com/inward/record.url?scp=85074543720&partnerID=8YFLogxK

Citationsformater

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title = "Suspended silicon nitride thin films with enhanced and electrically tunable reflectivity",

abstract = "We report on the realization of silicon nitride membranes with enhanced and electrically tunable reflectivity. A subwavelength one-dimensional grating is directly patterned on a suspended 200 nm thick, high stress commercial film using electron beam lithography. A Fano resonance is observed in the transmission spectrum of TM polarized light impinging on the membrane at normal incidence, leading to an increase in its reflectivity from 10% to 78% at 937 nm. The observed spectrum is compared to the results of rigorous coupled wave analysis simulations based on measurements of the grating transverse profile through localized cuts of the suspended film with a Focused Ion Beam. By mounting the membrane chip on a ring piezoelectric transducer and applying a compressive force to the substrate we subsequently observe a shift of the transmission spectrum by 0.23 nm.",

keywords = "OPTOMECHANICAL SYSTEM, REFLECTORS, ULTRASOUND, piezoelectric actuation, subwavelength grating, suspended thin films",

author = "Bhagya Nair and Andreas N{\ae}sby and Jeppesen, {Bjarke Rolighed} and Dantan, {Aurelien Romain}",

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T1 - Suspended silicon nitride thin films with enhanced and electrically tunable reflectivity

AU - Nair, Bhagya

AU - Næsby, Andreas

AU - Jeppesen, Bjarke Rolighed

AU - Dantan, Aurelien Romain

PY - 2019/9

Y1 - 2019/9

N2 - We report on the realization of silicon nitride membranes with enhanced and electrically tunable reflectivity. A subwavelength one-dimensional grating is directly patterned on a suspended 200 nm thick, high stress commercial film using electron beam lithography. A Fano resonance is observed in the transmission spectrum of TM polarized light impinging on the membrane at normal incidence, leading to an increase in its reflectivity from 10% to 78% at 937 nm. The observed spectrum is compared to the results of rigorous coupled wave analysis simulations based on measurements of the grating transverse profile through localized cuts of the suspended film with a Focused Ion Beam. By mounting the membrane chip on a ring piezoelectric transducer and applying a compressive force to the substrate we subsequently observe a shift of the transmission spectrum by 0.23 nm.

AB - We report on the realization of silicon nitride membranes with enhanced and electrically tunable reflectivity. A subwavelength one-dimensional grating is directly patterned on a suspended 200 nm thick, high stress commercial film using electron beam lithography. A Fano resonance is observed in the transmission spectrum of TM polarized light impinging on the membrane at normal incidence, leading to an increase in its reflectivity from 10% to 78% at 937 nm. The observed spectrum is compared to the results of rigorous coupled wave analysis simulations based on measurements of the grating transverse profile through localized cuts of the suspended film with a Focused Ion Beam. By mounting the membrane chip on a ring piezoelectric transducer and applying a compressive force to the substrate we subsequently observe a shift of the transmission spectrum by 0.23 nm.

KW - OPTOMECHANICAL SYSTEM

KW - REFLECTORS

KW - ULTRASOUND

KW - piezoelectric actuation

KW - subwavelength grating

KW - suspended thin films

UR - http://www.scopus.com/inward/record.url?scp=85074543720&partnerID=8YFLogxK

U2 - 10.1088/1402-4896/ab3d6f

DO - 10.1088/1402-4896/ab3d6f

M3 - Journal article

SN - 0031-8949

VL - 94

JO - Physica Scripta

JF - Physica Scripta

IS - 12

M1 - 125013

ER -

Suspended silicon nitride thin films with enhanced and electrically tunable reflectivity

Abstract

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