Squeeze film pressure sensors based on SiN membrane sandwiches

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We realize squeeze film pressure sensors using suspended, high mechanical quality silicon nitride membranes forming few-micron gap sandwiches. The effects of air pressure on the mechanical vibrations of the membranes are investigated in the range 10−3 − 50 mbar and the intermembrane coupling induced by the gas is discussed in light of a squeeze film coupled-oscillator model. The high responsivity (several kHz/mbar) and the sub-pascal sensitivity of such simple pressure sensors are attractive for absolute and direct pressure measurements in rarefied air or high vacuum environments.
OriginalsprogEngelsk
Artikelnummer111588
TidsskriftSensors and Actuators A: Physical
Vol/bind298
Antal sider7
ISSN0924-4247
DOI
StatusUdgivet - okt. 2019

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