Experimental Testing and Performance Comparisons between V- and Z-shaped Electrothermal Microactuators

Zhuo Zhang, Yueqing Yu, Xuping Zhang

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    Abstract

    This work presents comprehensive experimental studies on performance comparisons between V- and Z-shaped electrothermal microactuators. The V- and Z-shaped electrothermal microactuators are fabricated by depositing a copper layer on each side of SU-8 photoresist. The steady-state output displacement and dynamic responses of V- and Z-shaped actuators are compared based on experimental testing. In addition, a unique actuator with mixed V- and Z-shaped beams is designed and tested to further compare the force output capabilities of the V- and Z-shaped beams. Experimental data is acquired based on image processing, and a parallel spring model is proposed to analyze the experimental results. Comprehensive discussions are given to provide insights and guidance on the selection and design of the V- and Z-shaped electrothermal micoactuators.

    OriginalsprogEngelsk
    TitelProceedings of 2018 IEEE International Conference on Mechatronics and Automation, ICMA 2018 : ICMA
    Antal sider6
    Vol/bind2018
    ForlagIEEE
    Publikationsdato2018
    Sider521-526
    Artikelnummer8484473
    ISBN (Trykt)978-1-5386-6074-4
    ISBN (Elektronisk)978-1-5386-6075-1
    DOI
    StatusUdgivet - 2018
    BegivenhedThe 2018 IEEE International Conference on Mechatronics and Automation : ICMA 2018 - Changchun, Kina
    Varighed: 5 aug. 20188 aug. 2018

    Konference

    KonferenceThe 2018 IEEE International Conference on Mechatronics and Automation
    Land/OmrådeKina
    ByChangchun
    Periode05/08/201808/08/2018

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