@inproceedings{3ccb06104c57463e8dca9afd5c7845a2,
title = "Electrostatically tunable MEMS THz metamaterials based on DC/RF decoupled split-ring resonator arrays",
abstract = "High-frequency electromagnetic-field simulation HFSS has been performed on sub-millimeter scale split-ring resonator (SRR) metamaterials to propose electrostatically tunable THz frequency filters with integrated RF-MEMS variable capacitors and switches.",
keywords = "HFSS simulation, split ring resonator, THz",
author = "Zhengli Han and Hiroyuki Fujita and Hiroshi Toshiyoshi",
year = "2012",
doi = "10.1109/OMEMS.2012.6318785",
language = "English",
isbn = "9781457715112",
series = "International Conference on Optical MEMS and Nanophotonics",
publisher = "IEEE Computer Society",
pages = "27--28",
booktitle = "2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012",
note = "2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012 ; Conference date: 06-08-2012 Through 09-08-2012",
}