Electrostatic MEMS tunable split-ring resonators for THz filter applications

Zhengli Han, Kenta Kohno, Tomi Haatainen, Tapio Makela, Hiroyuki Fujita, Kazuhiko Hirakawa, Hiroshi Toshiyoshi

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5 Citationer (Scopus)

Abstract

We propose a new use of an RF-MEMS (radio frequency - micro electro mechanical systems) capacitive switch to construct a tunable terahertz filter. The built-in capacitor within a split-ring resonator is electrostatically actuated to shift the resonant frequency, providing a behavior as an ON/OFF switch for a particular frequency in the terahertz band. The device is compatible with the surface micromachining process of metals as well as with the roll-to-roll printing patterning for large and flexible sheet filters.

OriginalsprogEngelsk
TitelOptical MEMS and Nanophotonics 2013, OMN 2013 - Proceedings
Antal sider2
Publikationsdato2013
Sider165-166
Artikelnummer6659111
ISBN (Trykt)9781479915125
DOI
StatusUdgivet - 2013
Udgivet eksterntJa
Begivenhed2013 International Conference on Optical MEMS and Nanophotonics, OMN 2013 - Kanazawa, Japan
Varighed: 18 aug. 201322 aug. 2013

Konference

Konference2013 International Conference on Optical MEMS and Nanophotonics, OMN 2013
Land/OmrådeJapan
ByKanazawa
Periode18/08/201322/08/2013
NavnInternational Conference on Optical MEMS and Nanophotonics
ISSN2160-5033

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