@inproceedings{3857d5314c7947f8b76d7d4b053482c3,
title = "Electrostatic MEMS tunable split-ring resonators for THz filter applications",
abstract = "We propose a new use of an RF-MEMS (radio frequency - micro electro mechanical systems) capacitive switch to construct a tunable terahertz filter. The built-in capacitor within a split-ring resonator is electrostatically actuated to shift the resonant frequency, providing a behavior as an ON/OFF switch for a particular frequency in the terahertz band. The device is compatible with the surface micromachining process of metals as well as with the roll-to-roll printing patterning for large and flexible sheet filters.",
author = "Zhengli Han and Kenta Kohno and Tomi Haatainen and Tapio Makela and Hiroyuki Fujita and Kazuhiko Hirakawa and Hiroshi Toshiyoshi",
year = "2013",
doi = "10.1109/OMN.2013.6659111",
language = "English",
isbn = "9781479915125",
series = "International Conference on Optical MEMS and Nanophotonics",
publisher = "IEEE Computer Society",
pages = "165--166",
booktitle = "Optical MEMS and Nanophotonics 2013, OMN 2013 - Proceedings",
note = "2013 International Conference on Optical MEMS and Nanophotonics, OMN 2013 ; Conference date: 18-08-2013 Through 22-08-2013",
}