Dynamic Modelling and Analysis of V- and Z-shaped Electrothermal Microactuators

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DOI

  • Zhuo Zhang, College of Mechanical Engineering and Applied Electronics Technology, Beijing University of Technology
  • ,
  • Yueqing Yu, Beijing University of Technology, Danmark
  • Xinyu Liu, McGill University, Danmark
  • Xuping Zhang
OriginalsprogEngelsk
TidsskriftMicrosystem Technologies: Micro- and Nanosystems Information Storage and Processing Systems
Vol/bind23
Nummer8
Sider (fra-til)3775-3789
Antal sider16
ISSN0946-7076
DOI
StatusUdgivet - 2017

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