Dynamic Electro-thermal Modeling of V- and Z-shaped Electrothermal Microactuator

Zhuo Zhang, Yueqing Yu, Xinyu Liu, Xuping Zhang

    Publikation: Bidrag til bog/antologi/rapport/proceedingKonferencebidrag i proceedingsForskningpeer review

    Abstract

    This paper presents a dynamic electro-thermal model for the V- and Z-shaped electrothermal microactuator for the first time. The model predicts the dynamic temperature responses of the actuator operating in vacuum conditions with constant input voltage applied at both ends. Dynamics of the temperature distribution are established, and the exact solution of the hybrid partial differential equation (PDE) is obtained to describe the electro-thermal behavior for each segment of the actuator. To solve the PDE, the final temperature responses are intentionally decomposed into two parts, i.e., the steady-state and transient responses. In addition to the initial and boundary conditions, continuity conditions that describe the temperature and heat flux density between adjacent segments of the actuator are employed to solve the hybrid PDE. The validation of the model is conducted by finite-element simulations using ANSYS software (version 14.0). The analytical results based on the proposed model well agree with the numerical results with ANSYS analysis in terms of predictions on both steady-state and transient responses. Along with the line-shaped beam model, this proposed model serves as the first sub-model in establishing the complete dynamic electro-thermal-mechanical model for the V- and Z-shaped actuators. The developed modeling method paves the way in improving the design and optimizing the dimensions of the actuator in achieving better static and dynamic performances.

    OriginalsprogEngelsk
    Titel2016 IEEE International Conference on Mechatronics and Automation, IEEE ICMA 2016 : ICMA
    Antal sider6
    ForlagIEEE
    Publikationsdato2016
    Sider890-895
    Artikelnummer7558680
    ISBN (Elektronisk)9781509023943
    DOI
    StatusUdgivet - 2016
    BegivenhedMechatronics and Automation (ICMA) 2016 - Shangri-La, Harbin, Kina
    Varighed: 7 aug. 201610 aug. 2016
    http://2016.ieee-icma.org/

    Konference

    KonferenceMechatronics and Automation (ICMA) 2016
    LokationShangri-La
    Land/OmrådeKina
    ByHarbin
    Periode07/08/201610/08/2016
    Internetadresse

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