Closed-form modelling and design analysis of V- and Z-shaped electrothermal microactuators

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  • Zhuo Zhang, College of Mechanical Engineering and Applied Electronics Technology, Beijing University of Technology, Danmark
  • Weize Zhang, McGill University, Danmark
  • Qiyang Wu, McGill University, Danmark
  • Yueqing Yu, Beijing University of Technology, Danmark
  • Xinyu Liu, McGill University, Danmark
  • Xuping Zhang
OriginalsprogEngelsk
Artikelnummer015023
TidsskriftJournal of Micromechanics and Microengineering
Vol/bind27
Nummer1
Antal sider12
ISSN0960-1317
DOI
StatusUdgivet - 24 nov. 2016

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