Beam-induced annealing of defects created by implantation at 30 K in Si

Brian Bech Nielsen, Jens Ulrik Andersen

    Publikation: Bidrag til bog/antologi/rapport/proceedingKonferencebidrag i proceedingsForskningpeer review

    OriginalsprogEngelsk
    TitelProceedings of the 14th International Conference on Defects in Semiconductors
    RedaktørerH. J. von Bardeleben
    Publikationsdato1986
    Sider1129
    StatusUdgivet - 1986
    BegivenhedThe 14th International Conference on Defects in Semiconductors - Paris, Frankrig
    Varighed: 17 dec. 2010 → …

    Konference

    KonferenceThe 14th International Conference on Defects in Semiconductors
    Land/OmrådeFrankrig
    ByParis
    Periode17/12/2010 → …

    Citationsformater