A MEMS metamaterial for dynamic terahertz wave switching

Zhengli Han, Takuya Takahashi, Hiroshi Toshiyoshi

Publikation: Bidrag til bog/antologi/rapport/proceedingKonferencebidrag i proceedingsForskningpeer review

Abstract

A terahertz (THz) dynamic switch with polarization dependence is proposed with MEMS metamaterial method. The split ring resonators (SRRs) are located on a silicon-on-insulator (SOI) wafer, where the buried oxide (BOX) is etched to let the silicon layer together with the SRRs work as an electromechanical shutter to control the incident THz wave propagation. Electrostatic actuation is employed for the shutter operation.

OriginalsprogEngelsk
Titel16th International Conference on Nanotechnology - IEEE NANO 2016
Antal sider4
ForlagInstitute of Electrical and Electronics Engineers Inc.
Publikationsdato21 nov. 2016
Sider735-738
Artikelnummer7751545
ISBN (Elektronisk)9781509039142
DOI
StatusUdgivet - 21 nov. 2016
Udgivet eksterntJa
Begivenhed16th IEEE International Conference on Nanotechnology - IEEE NANO 2016 - Sendai, Japan
Varighed: 22 aug. 201625 aug. 2016

Konference

Konference16th IEEE International Conference on Nanotechnology - IEEE NANO 2016
Land/OmrådeJapan
BySendai
Periode22/08/201625/08/2016
Navn16th International Conference on Nanotechnology - IEEE NANO 2016

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