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Maryam Alizadeh Zolbin
Plasma-enhanced chemical vapor deposition of TiB2 and TiBN hard coatings using BBr3
Publikation: Bidrag til tidsskrift/Konferencebidrag i tidsskrift /Bidrag til avis › Tidsskriftartikel › Forskning › peer review
DOI
- https://doi.org/10.1016/j.triboint.2022.108137
Forlagets udgivne version
- Farid Movassagh-Alanagh, Tarbiat Modarres University ,
- Amir Abdollah-zadeh, Tarbiat Modarres University ,
- Maryam Alizadeh Zolbin
- Narguess Nemati
- Ramin Aghababaei
In this work, titanium nitride, titanium boro-nitride and titanium di boride coatings were deposited on H13 steel using plasma-enhanced chemical vapor deposition from BBr 3, TiCl 4, N 2, H 2 and Ar reactants at 500 °C. The results showed that the TiBN coating has a crystalline microstructure composed of both TiN and TiB 2 phases. The calculated crystalline size of the TiN, TiBN and TiB 2 coatings was about 13, 10 and 32 nm, respectively. The thickness of TiN, TiBN and TiB 2 coatings was about 2.5, 0.3 and 0.5 µm, respectively. The hardness of TiN, TiBN and TiB 2 films was 15.74, 19.44 and 23.47 GPa, respectively. The highest wear resistance was achieved for the TiB 2 coating thanks to its high hardness and good adhesion strength.
| Originalsprog | Engelsk |
|---|---|
| Artikelnummer | 108137 |
| Tidsskrift | Tribology International |
| Vol/bind | 179 |
| Antal sider | 16 |
| ISSN | 0301-679X |
| DOI | |
| Status | Udgivet - jan. 2023 |
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