Stress formation and relaxation in amorphous Ta-Cr films

Research output: Contribution to journal/Conference contribution in journal/Contribution to newspaperJournal articleResearchpeer-review

  • P. Andersen, Denmark
  • M. Moske, Denmark
  • K. Dyrbye, Denmark
  • J. Bøttiger, Denmark
  • Department of Physics and Astronomy
Original languageEnglish
JournalThin Solid Films
Pages (from-to)205
Publication statusPublished - 1999

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ID: 284810